Used process water from Ebara's wet benches is reclaimed, conserving water resources.

Producing a steady supply of ultrapure water is only part of the need at Ebara. It's equally important to maintain the water in its purified state as it passes through the manufacturing process. To hold that purity, the company chose Harvel LXT® for the construction of the distribution loop in order to maintain its Electronic Grade E-2 water quality requirement (minimum resistivity of 17.5 megohms at 25°C and on-line TOC no greater than 50 ppb).

"Our distribution loop plumbing pipe at Ebara's Pennsylvania plant is sized at 11/2-inch," Rosinski says. "Plumbing length is roughly 1,500 feet with a designed flow of 40 GPM. All through the system, the water passes through Harvel LXT® piping and remains ultrapure."